Cleanroom Tool Standard Operating Procedures (SOP)

Standard Operating Procedures:

• Heidelberg DWL-66 Laser Writer Short Manual (pdf)
• Heidelberg DWL-66 Laser Writer Long Manual (pdf)
• EVG 610 Mask Aligner (pdf)
• Laurell WS-650Mz Spin Coater (pdf)
• JEOL JSM 7001F SEM Imaging Short Manual (pdf)
• XENOS XPG2 EBL Short Manual (pdf)
• Reactiv Ion Etcher (dielectric material) (pdf)
• Reactiv Ion Etcher (metal) (pdf)
• HP 61 Hot Plate (pdf)
• UV Ozone Cleaner (pdf)
• KLA-Tencor Profiler D-300 (pdf)
• ECP EBL Pattern Edit manual (pdf)
• ECP EBL Pattern User manual (pdf)
• Nanomaster Dual Ebeam Short Manual (pdf)
• Trovato Thermal Evaporator (pdf)
• Oerlikon Ebeam system (pdf)
• Oerlikon sputtering system (pdf)
• Parylene Labcoter 2010 (pdf)
• West Bond 7476D Wirebonder (pdf)