CSI Knowledge Center (Q&A: topics related to gas delivery, abatement of hazardous gases, which components to use where and why, troubleshooting gas systems, etc.):
http://www.criticalsystemsinc.com/knowledge-center.html
Brigham Young University Cleanroom Training Videos
Stanford Nanofabrication Facility Training Videos
University of Utah Nanofab Training Videos
Cornell Nanofab Tool Training Video
Other Useful links